Abstract:
This course will focus on nano devices and their applications in the optical fields. The material will prepare students with principle physics and optical applications behind this emerging technology. The major topics include:

1) Introduction of history development from MEMS to NEMS (6 hours)
2) Fabrication technologies of the nano-etch technology (15 hours)
3) Governing physics in the nano world including actuation mechanism and mechanical structures (15 hours)
4) Short introduction of optics in free space and waveguide (6 hours)
5) Optical NEMS devices and case studies (6 hours)
Project presentation by students (optionally dependent upon students’ previous experiences)

References:
- Marc J. Madou, “Fundamentals of Microfabrication: The Science of Miniaturization”, Second Edition, CRC Press (ISBN: 0849308267)
- Steve Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2001
- Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures”, CRC Press (ISBN: 0849312620)
- Reading Assignments

Grading:
- Midterm 25%
- Final 40%
- Project 35%